Implementation of novel infrared sensor unit through CMOS/MEMS process and electrochemical etching process
碩士 === 國立成功大學 === 微機電系統工程研究所 === 93 === Infrared Sensors are mainly sorted in Quantum type and Thermal type. The principle of quantum type infrared sensor is “photovoltaic effect”, a process which the energy of the photon is transferred to an electron. Quantum type infrared sensors have much highe...
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| Format: | Others |
| Language: | zh-TW |
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2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64729965578307105228 |