Monitoring Wafer Defects and Clustering in IC Fabrication using Multivariate Exponentially Weighted Moving Average Control Chart
碩士 === 國立交通大學 === 工業工程與管理系所 === 93 === The c-chart is widely used in the integrated circuits (IC) manufacturers to monitor the wafer defects. However, the clustering of defects on a wafer due to the complicated manufacturing process becomes more evident with increased wafer size. The defect clusteri...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86901082633047185301 |