Study of Reliability Variation for Low Temperature Polysilicon Thin Film Transistors
碩士 === 國立交通大學 === 光電工程系所 === 93 === The thesis studies the issues about the uniformity of low temperature poly-silicon (LTPS) thin film transistor (TFT) affecting on the device reliability. Firstly, we collect devices fabricated by the identical process and establish the stress map including differe...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68709964029708500868 |