Fabrication and Characterization of Metal-induced Lateral Crystallization Polysilicon Thin-film Transistor with Multi-channel and Multi-gate
碩士 === 國立交通大學 === 電子工程系所 === 93 === I have studied the effects of NH3 plasma passivation on the electrical characteristics of pattern-dependent metal-induced lateral crystallization (PDMILC) polysilicon thin-film transistors (poly-Si TFTs). These transistors have various numbers of multiple channels...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/34965260092653740541 |