Study on the Process and Reliability of Poly-Si Thin-Film Transistors
碩士 === 國立交通大學 === 電子工程系所 === 93 === In this thesis, first, a process-compatible scheme for fabricating poly-Si TFTs on an FSG buffer layer was proposed and demonstrated. Experimental results reveal that remarkably improved device performance and uniformity can be achieved with appropriate fluorine c...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81386968368862368140 |