The Fabrication and Stability Study of the Novel Structure of LTPS TFTs
碩士 === 國立交通大學 === 電子工程系所 === 93 === In this paper, a novel structure of the polycrystalline silicon thin-film transistors (Poly-Si TFT’s) with a thicker source/drain and a thin channel have been developed and investigated. In the proposed structure, the thick source/drain and a thin active region co...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80519573963936569669 |