Near-Field Optical Properties of Microstructures on AlGaN Thin Films
碩士 === 國立交通大學 === 電子物理系所 === 93 === In this article, we analyzed the optical properties of the microstructures on AlGaN films with near-field scanning optical microscopy (NSOM). Different types of hillocks (mesa-like, tent-like, and pyramid-like) appeared on the film with AlN buffer layer while V-sh...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83094923485089483139 |