Optical Scanning Technique Applied to the Backside Imaging of Silicon ICs
碩士 === 國立交通大學 === 電子物理系所 === 93 === The purpose of this thesis is based on optical scanning systems to probe the inner structures of silicon IC chips by compendious and valid methods. Except for high resolving power, the design introduces more consideration to the present of silicon substrate, whose...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32098805085204420340 |