The study of various CMOS manufacturing compatible sensing layers on pH-ISFET
碩士 === 國立交通大學 === 電機資訊學院碩士在職專班 === 93 === In this thesis, standard manufacture processes of Complementary Metal Oxide Semiconductor (CMOS) are introduced to fabricate Ion-selective Field Effect Transistors (ISFET). This device is differ from MOSFET on the metal gate of MOSFET was substituted by an...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33568249873894681382 |