Application and fabrication of surface acoustic wave biosensor
碩士 === 國立交通大學 === 機械工程系所 === 93 === A surface acoustic wave biosensor fabricated by semiconductor manufacture process was developed, its application was tested. The surface acoustic wave biosensor is created by inter-digital transducers (IDTs) and photo-deposited on the surface of piezoelectric thi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68220972572268596428 |