Effects and Applications of Electron Beam Irradiation and Nanoimprinting on Polymers
博士 === 國立交通大學 === 應用化學系所 === 93 === Alternative techniques to cost-intensive or limited-access fabrication methods with nanometre resolution have been under development for nearly two decades. Two clear examples are electron beam and nanoimprint lithography technologies. The main attributes of the e...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65386307863363264467 |