Performance Improvement of Zeolite Concentrator for VOCs Removal - Adsorbent Modification and Combining with Condenser

博士 === 國立交通大學 === 環境工程系所 === 93 === One of the most commonly used volatile organic compounds (VOCs) abatement devices by the semiconductor and optoelectronic manufacturers is zeolite concentrator. The excellent efficiency of zeolite concentrator for VOCs removal has been proved to be over 90%. Howev...

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Bibliographic Details
Main Authors: Yu-Chih Lin, 林育旨
Other Authors: Hsunlig Bai
Format: Others
Language:zh-TW
Published: 2005
Online Access:http://ndltd.ncl.edu.tw/handle/27797395686883231293