Deposition characteristics of condensable organic airborne molecular contaminants on wafer surfaces in cleanrooms
博士 === 國立交通大學 === 環境工程系所 === 93 === Semiconductor industry has been a central figure to the economic growth in Taiwan, especially for the fabrication sector of integrated circuit (IC) that has evolved into world-leading status. The fabrication technology advances so far that the feature size (or cri...
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| Format: | Others |
| Language: | zh-TW |
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2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/rj5wb8 |