The Design and Analysis of Micro-Mirror Measurement System
碩士 === 國立交通大學 === 電機與控制工程系所 === 93 === This thesis describes the study of spot measurements on micromachined mirrors. The present study is organized as follows: First, verification and implication of the nonlinear dynamic and frequency response of electrostatic actuator, which due to the double freq...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78820862437906428312 |