Fabrication of PZT-based biosensor with sol-gel process
碩士 === 國立交通大學 === 奈米科技研究所 === 93 === In recent years, the superior piezoelectric performance of lead-zirconate-titanate （PZT，PbZrxTi1-xO3） ceramic materials were applied for microelectro-mechanical-systems（MEMS）intensively. We deposited 0.6μm PZT piezoelectric thin film on silicon wafer, and applie...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/00385827184651581432 |