Process Modeling and Analysis for the Manufacturing Execution System of Foundry Fab
碩士 === 國立中央大學 === 工業管理研究所 === 93 === This paper focuses on the design and realization of an application framework to develop Manufacturing Execution System (MES) for semiconductor fab to optimize production activities in shop floor and on rapid response for changeful conditions. MES is the accumulat...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/54892868281413538053 |