Process Improvements of Large-Area Silicon Strip Detector
碩士 === 國立中央大學 === 電機工程研究所 === 93 === In order to obtain the better performances, such as lower leakage current and higher breakdown voltage, of a large-area silicon strip detector. Its device the structure design and process improvements have been studied in this thesis. Several different processes...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73778918050772166021 |