The influences of exposed and developed parameters on the shape of periodic structure for interferometric lithography
碩士 === 國立中央大學 === 機械工程研究所 === 93 === In this research, we have developed a laser interference lithography system with high resolution. This system can write pattern directly on the photoresist without using mask, and construct nano-size periodic structures in one or two dimension easily. One dimensi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32721487153420815597 |