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碩士 === 國立中央大學 === 環境工程研究所碩士在職專班 === 93 === Semiconductor and TFT-LCD processes use a significant amount of special gases. Most of these special gases are halogenated acid gases, e.g., Cl2, HCl, ClF3, and HBr, etc… The special gases are toxic to human and cause corrosion on pipes and process tools. M...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23787317939725637747 |