Friction Behavior and Control Design for Piezo-Actuated Stage in Micro-Scale

碩士 === 國立彰化師範大學 === 機電工程學系 === 93 === Abstract The aim of this paper is to improve the tracking problem of piezoelectric actuator (PEA) in precision motion control. The tracking control accuracy of the piezoelectric actuator is limited due to their inherent hysteretic nonlinearity. Direct drive...

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Bibliographic Details
Main Authors: Mou-Sheng Lin, 林茂雄
Other Authors: Yi-Cheng Huang
Format: Others
Language:zh-TW
Published: 2005
Online Access:http://ndltd.ncl.edu.tw/handle/48128741029693874000