Design of an Execution Control for a Generic Cluster Tool with an Event-Driven Modularized Colored Petri Net
碩士 === 國立高雄第一科技大學 === 系統與控制工程研究所 === 93 === For the purpose of improving process cleanness, decreasing surface contamination, increasing production yield, and shortening lead time, it has been a trend to integrated several processing chambers into a cluster tool in the semiconductor industry. In a c...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/00132259327046852107 |