The Squeeze Film Damping Effect on Electro-Micromechanical Resonators
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 93 === This paper is going to emphasize on the air squeeze film damping effect on micro-mechanical resonant beam in MEMS. In general, the low energy density of electrode force will cause high-voltage power supply to drive the electro- micro resonators; reducing the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01331413373254859960 |