Lot Permission Rule in Wafer Fabrication Factories with Queue-Time-Limit Considerations
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 93 === As far as the wafer fabrication process is concerned, there are many factors affecting the throughput and yield rate. One of them is the “Queue-Time-Limit”. Certain process steps have the queue-time-limit, which means a lot needs to begin the following proces...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/35929258687473423711 |