A Process Management Framework for the Facility System Engineering Expansion Project for Semiconductor Manufacturing Fab and An Empirical Study
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 93 === A new building plant, no matter a silicon wafer plant or TFT-LCD manufacturing factory, consists of many efforts including civil structure architecture engineering, electrical & mechanical system engineering, clean room system engineering, process equipme...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81196015348072908883 |