Thermal stability and Electrical conduction of the wet-oxided AlAs in GaAs MOS capacitor
碩士 === 國立清華大學 === 材料科學工程學系 === 93 === In this thesis we study the influence to the thermal stabilities and conduction of oxidized AlAs/GaAs interface. The surface morphology and Raman spectra are obtained by varying the oxidation time and in-situ annealing to deduce the oxidation mechanism and the r...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68491129530369889358 |