Crystallization Behaviors of Amorphous Si and SiGe Thin Films
博士 === 國立清華大學 === 材料科學工程學系 === 93 === Polycrystalline Silicon (poly-Si) and polycrystalline silicon-germanium (poly-SiGe) thin films are of interest as the basic channel materials in high performance thin film transistors for optoelectronic devices. Metal-induced crystallization of amorphous thin fi...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05439082753366869543 |