GaAs MOSFET and MESFET: MBE Growth, Processing, Characterization, and Analysis
碩士 === 國立清華大學 === 材料科學工程學系 === 93 === ABSTRACT In this thesis, recent results on GaAs MESFET and MOSFET were discussed; including MBE growth of GaAs:Si channel layer, deposition of Ga2O3(Gd2O3), device processing and characteristics. For the fabrication of n-channel GaAs MESFET, the planar processin...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/55825173102702505383 |