Design of a Bulk-micromachined CMOS-MEMS accelerometer
碩士 === 國立清華大學 === 電子工程研究所 === 93 === This work develops a post-CMOS (Complementary Metal Oxide Semiconductor) bulk-micromachining process for fabrication of a capacitive accelerometer and its dedicated high-performance for applications with target value: µG resolution. The important feature of the...
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| Format: | Others |
| Language: | zh-TW |
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2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57291879852225268356 |