Developement of transparent ZnO-based optoelectronic devices
碩士 === 國立清華大學 === 電子工程研究所 === 93 === In this thesis, we deposited ZnO thin-film using RF-magnetron reactive sputtering. Argon and oxygen are used as the reactive gas source. We verified the mixture ratio, substrate temperature and total pressure to deposit different crystalline and composition thin-...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80581291988714689020 |