Effect of bias and heat treatment on the microstructure and properties of ZrN thin films deposited by Filtered Cathodic Arc Ion-Plating
碩士 === 國立清華大學 === 工程與系統科學系 === 93 === Nano-crystalline ZrN films were deposited on Si (100) and AISI 304 stainless steel substrates using Filtered Cathodic Arc Deposition (FCAD) system. The effects of negative substrate bias and thermal treatment were investigated on the composition, structures, pro...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/ft4935 |