The Design, Fabrication and Applications of Micro Fiber Optic Fabry-Perot Sensors
博士 === 國立清華大學 === 工程與系統科學系 === 93 === The development of the fiber optic sensors in this research is based on the principle of Fabry-Perot interferometry and the Polymer MEMS fabrication technology. One of the designs is for the application of the shear stress and nano-displacement measurement, and...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/979kff |