Design and Simulation of High Frequency Micromechanical Resonators
碩士 === 國立清華大學 === 工程與系統科學系 === 93 === Design high natural frequency �慆echanical resonators for communication applications. This high frequency �慆echanical resonator is designed based on breaking GHz barrier, tiny size, high Q’s, zero DC power consumption and integrate with CMOS IC process. �慆echanic...
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| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/59dhhv |