The Study and Fabrication of IR Cutoff Filter with Optical Multi-Films deposited by a DC Isolating Oxide Sputter
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 93 === In this thesis, we deposit niobium oxide (NbxOy) and silicon oxide (SixOy) films by the DC Isolating Oxide Sputter, which the deposition rate can be improved by 3.7 and 4.7 times, respectively, as compared with that by the reactive magnetron sputtering system .T...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/16252671050581181093 |