Fabrication and Applicaion of Silicon Nano-structures
碩士 === 國立臺灣大學 === 光電工程學研究所 === 93 === Technology of nano-structures on silicon is investigated. An excimer laser pulse melts a thin surface layer of silicon through a quartz mold, and it is embossed into the resulting liquid layer. There are two methods for quartz mold fabrication. First, etch the s...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52591858114937034016 |