Preparation of CoTb/FePt thermo-magneticrecording media
碩士 === 國立臺灣大學 === 材料科學與工程學研究所 === 93 === DC magnetron sputtering is used to deposit 200 Å Fe50Pt50 film on the naturally oxidized Si (100) and glass substrates at various substrate temperatures , then deposited 500 Å Co70.44Tb29.56 film on the FePt film. Finally, a SiNx film with thickness of 300 Å...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87789990991568483766 |