Fabrication and optical investigation of nanostructures by Atomic Force Microscopy
碩士 === 國立臺灣大學 === 物理研究所 === 93 === We present a nanolithography technique based on an atomic force microscopy (AFM). A thin resist layer on the sample surface is plastically indented by a vibrating tip. Controlling of the vibration amplitude and tip movement enables one to plow a narrow furrow along...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/26478618196563116550 |