Integrated High Speed Precision Positioning System and Designing for the Controlled Strategy of Dual Stage Actuator
碩士 === 國立臺灣大學 === 工程科學及海洋工程學研究所 === 93 === The ultra precision positioning technique has become one of the important parts in the development of the precision machines. Our lab has many experiences on developing metrology’s system； but to the positioning tech, the subsystem will extend for the posit...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68259863477261904439 |