The Study of Split-Gate Non-Volatile Memory Technology
博士 === 國立臺灣大學 === 電機工程學研究所 === 93 === The study presented in this thesis is dedicated to split-gate non-volatile memory process technology improvement and cell characterization. A sharp poly-tip structure, generated by using a LOCOS-like approach is introduced to increase the electric field when the...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2005
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Online Access: | http://ndltd.ncl.edu.tw/handle/64550923407244749138 |