The Study of Split-Gate Non-Volatile Memory Technology

博士 === 國立臺灣大學 === 電機工程學研究所 === 93 === The study presented in this thesis is dedicated to split-gate non-volatile memory process technology improvement and cell characterization. A sharp poly-tip structure, generated by using a LOCOS-like approach is introduced to increase the electric field when the...

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Bibliographic Details
Main Authors: Wen-Ting Chu, 朱文定
Other Authors: Hao-Hsiung Lin
Format: Others
Language:en_US
Published: 2005
Online Access:http://ndltd.ncl.edu.tw/handle/64550923407244749138