Fabrication of Optical Waveguide Devices Using Gas-Assisted UV Nanoimprinting with Soft Mold
碩士 === 國立臺灣大學 === 機械工程學研究所 === 93 === Abstract This thesis is devoted to the fabrication of optical waveguide using gas-assisted imprinting with soft mold. The process integrates lithography、UV curable photoresist and gas assisted pressuring mechanism into imprinting. The microstructures on the Si...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96463593473840828121 |