Fabrication of Optical Waveguide Devices Using Gas-Assisted UV Nanoimprinting with Soft Mold

• Main Authors: Yung-Chun Weng, 翁永春
• Other Authors: 楊申語
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/96463593473840828121

碩士 === 國立臺灣大學 === 機械工程學研究所 === 93 === Abstract This thesis is devoted to the fabrication of optical waveguide using gas-assisted imprinting with soft mold. The process integrates lithography、UV curable photoresist and gas assisted pressuring mechanism into imprinting. The microstructures on the Si molds are first replicated onto thermoplastic PC film using gas-assisted hot embossing process. PDMS molds can be obtained by casting on the PC films. UV-curable resins are spreaded on the PDMS mold employing reversal imprinting technique. The PDMS mold and SiO2 substrate are then brought in contact and pressed using gas pressure in a closed chamber. In this process, the PDMS soft mold is used and gas is used as pressuring media. Conformal contact and uniform imprinting pressure throughout the whole area can be achieved. Furthermore, PDMS mold has low surface energy and anti-adhere to resist. It is found that fabricating optical waveguide devices using this process can reduce residual layer to minimum. The ridge-shaped waveguides of 80μm width and 80μm depth were successfully made; the propagation losses measured at 1310 nm was 1.6 dB/cm. It is demonstrated that this technique has great potential for effectively replicating large area micro-nano structures.