Effects of SPM Servo on the Stereo Lithography
碩士 === 國立臺灣大學 === 機械工程學研究所 === 93 === This paper addresses the three-dimensional scanning probe microscopy (SPM). The previous research has shown that the servo controller imposes significant effect on the lithography. A good controller enables a uniform and precise lithography pattern. This researc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17978806219467103043 |