A Micro Heat Pipe Chip Integrated with Micro Heater and In-situ Temperature Sensor Array
碩士 === 國立臺灣大學 === 應用力學研究所 === 93 === Due to the improvement of semiconductor manufacturing techniques, the quantities and densities of electric components on a single chip increase quickly. The heat dissipated of miniaturized make chips to be operated in higher temperature which will decrease not on...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91852002684429364681 |