Studies on Chemical Vapor Deposition of Ruthenium Dioxide and Iridium Dioxide Nanorods and their Gas Sensing Characteristics
碩士 === 國立臺灣科技大學 === 化學工程系 === 93 === In this thesis we investigated the metal organic chemical vapor deposition (MOCVD) deposition of ruthenium oxide and iridium oxide onto the gold electrode on the piezoelectric quartz crystal for gas sensor applications. The surface structure and morphology of RuO...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/47710704748652312730 |