Research of Using Dynamic Mask Photolithography Technology to Fabricate 3D Micro-Device in Single Layer
碩士 === 國立臺灣科技大學 === 機械工程系 === 93 === The aim of this thesis is studying the hardening mechanism of photo -polymer material and demonstrates new concept and method to fabricate micro 3D components on the single floor of materials. In the fabricating process, this research uses surface forming technol...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15198053468047665008 |