The Study of Fuzzy and TRIZ Theory Application to Chemical Mechanical Polishing Problem and Decision System
碩士 === 國立臺灣科技大學 === 機械工程系 === 93 === This thesis is to study and develop a questions and answers decision system (Q&A system) for chemical and mechanical polishing (CMP) process. The Q&A system proposed in this work can be applied to 8 inch wafer polishing, interlayer dielectric, IC planariz...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33292979196718004140 |