The Study of Fuzzy and TRIZ Theory Application to Chemical Mechanical Polishing Problem and Decision System

• Main Authors: Yu Liang, 余亮
• Other Authors: Y.C.Lin
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/33292979196718004140

碩士 === 國立臺灣科技大學 === 機械工程系 === 93 === This thesis is to study and develop a questions and answers decision system (Q&A system) for chemical and mechanical polishing (CMP) process. The Q&A system proposed in this work can be applied to 8 inch wafer polishing, interlayer dielectric, IC planarization, top metal and DRAM polishing processes. Ontology concept is used to build up the domain knowledge, and then transform the domain knowledge to useful engineering data-based. Additionally, the construction of data-based based on object-oriented knowledge representation. Some constrain conditions are used to link the relationship between the object and process parameter. Some applicable solutions for the specific question of process are proposed by this system according to the inference rules and fuzzy theory. TRIZ theory is used to compromise the conflict between the relative parameters of process. The solutions proposed by this system can be interchange among the relative systems by XML format. Moreover, this Q&A system not only can operate independently but also link other system or engineering agent. The results of system test show that the solution gotten by this system is reasonable compare with the method which used to solve CMP process. As the user to choose optimal solutions proposed by this system, it could improve the process problems quickly and effectively. Moreover TRIZ-CMP contradiction matrix can avoid another problem occurs during polishing process when some parameters of process were adjusted to solve the specific problem.