The study of the microstructure of Au(Ge)/GaP wafer after thermal processes
碩士 === 國立臺灣科技大學 === 機械工程系 === 93 === The object of this thesis was to study the metallization layers of Au/AuGe/Au on n-type GaP wafers. The Au/AuGe/Au layers were deposited onto the GaP wafers by a thermal evaporation method. After the evaporation process the GaP wafers were annealed in either trad...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/40152972628136106604 |