Evaluation of magnetoresistance characteristic of co-sputtered Co-Ti-O granular alloy thin films
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 93 === Co-Ti-O thin films on SiO2 substrate were prepard by using RF and DC magnetron co-sputtering methods under different Ar/O2 ratio. As-deposited Co-Ti-O films were annealed by a rapid thermal annealy (RTA) and hence to crystallized the thin films into Co-Ti-O...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/222f6t |