The Process of Nickel Induced Lateral Crystallization and Application on Thin Film Transistor
碩士 === 南台科技大學 === 電機工程系 === 93 === In this thesis, Nickel Induced Lateral Crystallization (MILC) method was employed to crystallize α-Si films for low temperature Poly-Si (LTPS) application. The crystallization rate of metal induced lateral crystallization is generally low with a typical crystalliza...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43634609557706070488 |