The Path Planning Application of Precision Positioning Submacro Platform by Using AutoCAD Interface Platform
碩士 === 國立臺北科技大學 === 機電整合研究所 === 93 === Moving smally and accurately has become the trend of modern integrated circuit. In the development of precision engineering, the requirements of μm order even nm order precision position control are increased rapidly. To established an nano platform by combinin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43730381156048795116 |